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Wafer Fabrication: Automatic Materiel Handling System
Jie Zhang (Autor)
·
De Gruyter
· Tapa Dura
Wafer Fabrication: Automatic Materiel Handling System - Jie Zhang
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Reseña del libro "Wafer Fabrication: Automatic Materiel Handling System"
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.
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