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Semiconductor Strain Metrology: Principles and Applications
Terence K. S. Wong
(Autor)
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Bentham Science Publishers
· Tapa Blanda
Semiconductor Strain Metrology: Principles and Applications - S. Wong, Terence K.
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Reseña del libro "Semiconductor Strain Metrology: Principles and Applications"
This book surveys the major and newly developed techniques for semiconductor strain metrology. Semiconductor strain metrology has emerged in recent years as a topic of great interest to researchers involved in thin film and nanoscale device characterization. This book employs a tutorial approach to explain the principles and applications of each technique specifically tailored for graduate students and postdoctoral researchers. Selected topics include optical, electron beam, ion beam and synchrotron x-ray techniques. Unlike earlier references, this book specifically discusses strain metrology as applied to semiconductor devices with both depth and focus.
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