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Nanofabrication: Nanolithography techniques and their applications
De Teresa, José María ; Perez Murano, Francesc ; Martín, José Ignacio (Autor)
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Institute of Physics Publishing
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Nanofabrication: Nanolithography techniques and their applications - de Teresa, José María ; Perez Murano, Francesc ; Martín, José Ignacio
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Reseña del libro "Nanofabrication: Nanolithography techniques and their applications"
A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. Ideally suited for Master/PhD students who need a basic understanding of nanolithography techniques and their applications. The book also contains state-of-the-art information for researchers needing to expand their knowledge of nanofabrication.