Libro the physics of submicron lithography De valiev

portada the physics of submicron lithography

Formato

Libro Físico

Editorial

springer publishing map

Autor

valiev

Idioma

Inglés

N° páginas

510

ISBN

0306435780

ISBN13

9780306435782

Categorías

Fïsica de la materia condensada

the physics of submicron lithography

Valiev (Autor) · springer publishing map · Libro Físico

Sin Stock

Reseña del libro "the physics of submicron lithography"

this monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and x-ray lithography. topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.